Application of automated defect detection for failure analysis in scanning acoustic microscopy
Failure analysis holds a pivotal role in semiconductor design, reliability testing and field reject investigation to ascertain the underlying causes of failure. Among the range of non-destructive imaging techniques commonly applied in failure analysis, Scanning Acoustic Microscopy (SAM) is used to d...
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| Format: | Thesis-Master by Research |
| Language: | English |
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Nanyang Technological University
2024
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| Online Access: | https://hdl.handle.net/10356/173328 |
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| Institution: | Nanyang Technological University |
| Language: | English |