Towards an intelligent in-line temperature measurement system for semiconductor manufacturing

Conference Record - IEEE Instrumentation and Measurement Technology Conference

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Bibliographic Details
Main Authors:	Tan, W.W., Zhang, J., Loh, A.P.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	In-situ temperature measurement Out-of-contact fault Post-exposure bake
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72049
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72049
record_format	dspace
spelling	sg-nus-scholar.10635-720492015-02-01T12:46:36Z Towards an intelligent in-line temperature measurement system for semiconductor manufacturing Tan, W.W. Zhang, J. Loh, A.P. ELECTRICAL & COMPUTER ENGINEERING In-situ temperature measurement Out-of-contact fault Post-exposure bake Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 374-379 CRIIE 2014-06-19T03:30:52Z 2014-06-19T03:30:52Z 2001 Conference Paper Tan, W.W.,Zhang, J.,Loh, A.P. (2001). Towards an intelligent in-line temperature measurement system for semiconductor manufacturing. Conference Record - IEEE Instrumentation and Measurement Technology Conference 1 : 374-379. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72049 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	In-situ temperature measurement Out-of-contact fault Post-exposure bake
spellingShingle	In-situ temperature measurement Out-of-contact fault Post-exposure bake Tan, W.W. Zhang, J. Loh, A.P. Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
description	Conference Record - IEEE Instrumentation and Measurement Technology Conference
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, W.W. Zhang, J. Loh, A.P.
format	Conference or Workshop Item
author	Tan, W.W. Zhang, J. Loh, A.P.
author_sort	Tan, W.W.
title	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
title_short	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
title_full	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
title_fullStr	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
title_full_unstemmed	Towards an intelligent in-line temperature measurement system for semiconductor manufacturing
title_sort	towards an intelligent in-line temperature measurement system for semiconductor manufacturing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72049
_version_	1681087494891765760

Towards an intelligent in-line temperature measurement system for semiconductor manufacturing

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