Towards an intelligent in-line temperature measurement system for semiconductor manufacturing

• Main Authors: Tan, W.W., Zhang, J., Loh, A.P.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: In-situ temperature measurement; Out-of-contact fault; Post-exposure bake
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/72049
• Institution: National University of Singapore

Conference Record - IEEE Instrumentation and Measurement Technology Conference