Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation

10.1016/j.egypro.2012.02.011

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Bibliographic Details
Main Authors:	Liao, B., Aberle, A.G., Mueller, T., Verma, L.K., Danner, A.J., Yang, H., Bhatia, C.S.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Electron beam lithography High aspect ratio Metallisation Silicon wafer solar cells Ultrafine fingers
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72116
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72116
record_format	dspace
spelling	sg-nus-scholar.10635-721162023-10-25T20:57:35Z Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation Liao, B. Aberle, A.G. Mueller, T. Verma, L.K. Danner, A.J. Yang, H. Bhatia, C.S. ELECTRICAL & COMPUTER ENGINEERING Electron beam lithography High aspect ratio Metallisation Silicon wafer solar cells Ultrafine fingers 10.1016/j.egypro.2012.02.011 Energy Procedia 15 91-96 2014-06-19T03:31:36Z 2014-06-19T03:31:36Z 2012 Conference Paper Liao, B., Aberle, A.G., Mueller, T., Verma, L.K., Danner, A.J., Yang, H., Bhatia, C.S. (2012). Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation. Energy Procedia 15 : 91-96. ScholarBank@NUS Repository. https://doi.org/10.1016/j.egypro.2012.02.011 18766102 http://scholarbank.nus.edu.sg/handle/10635/72116 000306068100011 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Electron beam lithography High aspect ratio Metallisation Silicon wafer solar cells Ultrafine fingers
spellingShingle	Electron beam lithography High aspect ratio Metallisation Silicon wafer solar cells Ultrafine fingers Liao, B. Aberle, A.G. Mueller, T. Verma, L.K. Danner, A.J. Yang, H. Bhatia, C.S. Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
description	10.1016/j.egypro.2012.02.011
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liao, B. Aberle, A.G. Mueller, T. Verma, L.K. Danner, A.J. Yang, H. Bhatia, C.S.
format	Conference or Workshop Item
author	Liao, B. Aberle, A.G. Mueller, T. Verma, L.K. Danner, A.J. Yang, H. Bhatia, C.S.
author_sort	Liao, B.
title	Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
title_short	Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
title_full	Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
title_fullStr	Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
title_full_unstemmed	Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
title_sort	ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72116
_version_	1781783241338912768

Ultrafine and high aspect ratio metal lines by electron beam lithography for silicon solar cell metallisation

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