Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)

10.1109/EPTC.2012.6507104

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Bibliographic Details
Main Authors:	Soon, B.W., Singh, N., Tsai, J.M., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/72146
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-72146
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spelling	sg-nus-scholar.10635-721462015-01-14T17:39:53Z Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD) Soon, B.W. Singh, N. Tsai, J.M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/EPTC.2012.6507104 Proceedings of the 2012 IEEE 14th Electronics Packaging Technology Conference, EPTC 2012 342-345 2014-06-19T03:31:59Z 2014-06-19T03:31:59Z 2012 Conference Paper Soon, B.W.,Singh, N.,Tsai, J.M.,Lee, C. (2012). Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD). Proceedings of the 2012 IEEE 14th Electronics Packaging Technology Conference, EPTC 2012 : 342-345. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/EPTC.2012.6507104" target="_blank">https://doi.org/10.1109/EPTC.2012.6507104</a> 9781467345514 http://scholarbank.nus.edu.sg/handle/10635/72146 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/EPTC.2012.6507104
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Soon, B.W. Singh, N. Tsai, J.M. Lee, C.
format	Conference or Workshop Item
author	Soon, B.W. Singh, N. Tsai, J.M. Lee, C.
spellingShingle	Soon, B.W. Singh, N. Tsai, J.M. Lee, C. Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
author_sort	Soon, B.W.
title	Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
title_short	Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
title_full	Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
title_fullStr	Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
title_full_unstemmed	Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)
title_sort	vacuum based wafer level encapsulation (wle) of mems using physical vapor deposition (pvd)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/72146
_version_	1681087512636817408

Vacuum based wafer level encapsulation (WLE) of MEMS using physical vapor deposition (PVD)

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