Integrated (automated) photon emission microscope and MOSFET characterization system for combined microscopic and macroscopic device analysis

• Main Authors: Ng, T.H., Chim, W.K., Chan, D.S.H., Phang, J.C.H., Liu, Y.Y., Lou, C.L., Leang, S.E., Tao, J.M.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/72705
• Institution: National University of Singapore

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA