Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing
IECON Proceedings (Industrial Electronics Conference)
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2014
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sg-nus-scholar.10635-727082015-01-28T12:36:04Z Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. ELECTRICAL ENGINEERING IECON Proceedings (Industrial Electronics Conference) 1 6-10 IEPRE 2014-06-19T05:11:06Z 2014-06-19T05:11:06Z 1999 Conference Paper Lim, K.W.,Luo, J.,Gu, J.,Poh, Y.P.,Tan, W.W.,Loh, A.P. (1999). Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing. IECON Proceedings (Industrial Electronics Conference) 1 : 6-10. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/72708 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
IECON Proceedings (Industrial Electronics Conference) |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. |
| format |
Conference or Workshop Item |
| author |
Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. |
| spellingShingle |
Lim, K.W. Luo, J. Gu, J. Poh, Y.P. Tan, W.W. Loh, A.P. Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| author_sort |
Lim, K.W. |
| title |
Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| title_short |
Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| title_full |
Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| title_fullStr |
Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| title_full_unstemmed |
Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| title_sort |
integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/72708 |
| _version_ |
1681087614860394496 |