Integrated in-line temperature measurement system for silicon wafer semiconductor manufacturing

• Main Authors: Lim, K.W., Luo, J., Gu, J., Poh, Y.P., Tan, W.W., Loh, A.P.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/72708
• Institution: National University of Singapore

IECON Proceedings (Industrial Electronics Conference)