Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Ho, W.K., Tay, A.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Optimal control
Process control
Semiconductor manufacturing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/72746
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Institution: National University of Singapore
Description
Summary:Proceedings of SPIE - The International Society for Optical Engineering

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