A new scanning MEMS mirror

10.1007/s00542-006-0343-4

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Bibliographic Details
Main Authors: Wang, Z.F., Noell, W., Zickar, M., De Rooij, N., Lim, S.P.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73064
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Institution: National University of Singapore
Description
Summary:10.1007/s00542-006-0343-4