A new scanning MEMS mirror

10.1007/s00542-006-0343-4

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Bibliographic Details
Main Authors:	Wang, Z.F., Noell, W., Zickar, M., De Rooij, N., Lim, S.P.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73064
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Institution:	National University of Singapore

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record_format	dspace
spelling	sg-nus-scholar.10635-730642023-10-30T21:40:08Z A new scanning MEMS mirror Wang, Z.F. Noell, W. Zickar, M. De Rooij, N. Lim, S.P. MECHANICAL ENGINEERING 10.1007/s00542-006-0343-4 Microsystem Technologies 13 11-12 1595-1599 2014-06-19T05:30:45Z 2014-06-19T05:30:45Z 2007-07 Conference Paper Wang, Z.F., Noell, W., Zickar, M., De Rooij, N., Lim, S.P. (2007-07). A new scanning MEMS mirror. Microsystem Technologies 13 (11-12) : 1595-1599. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-006-0343-4 09467076 http://scholarbank.nus.edu.sg/handle/10635/73064 000252826700023 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-006-0343-4
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Wang, Z.F. Noell, W. Zickar, M. De Rooij, N. Lim, S.P.
format	Conference or Workshop Item
author	Wang, Z.F. Noell, W. Zickar, M. De Rooij, N. Lim, S.P.
spellingShingle	Wang, Z.F. Noell, W. Zickar, M. De Rooij, N. Lim, S.P. A new scanning MEMS mirror
author_sort	Wang, Z.F.
title	A new scanning MEMS mirror
title_short	A new scanning MEMS mirror
title_full	A new scanning MEMS mirror
title_fullStr	A new scanning MEMS mirror
title_full_unstemmed	A new scanning MEMS mirror
title_sort	new scanning mems mirror
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73064
_version_	1781783274779049984

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