A new scanning MEMS mirror
10.1007/s00542-006-0343-4
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Main Authors: | Wang, Z.F., Noell, W., Zickar, M., De Rooij, N., Lim, S.P. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73064 |
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Institution: | National University of Singapore |
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