Characterizations of micromachined devices using Planar Motion Analyzer (PMA)

Characterizations of micromachined devices using Planar Motion Analyzer (PMA)

10.1109/ICSENS.2005.1597711

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Bibliographic Details
Main Authors: Ongkodjojo, A., Tay, F.E.H.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73248
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Institution: National University of Singapore
Description
Summary:10.1109/ICSENS.2005.1597711

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