Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

10.1007/s00542-007-0429-7

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Bibliographic Details
Main Authors: Ongkodjojo, A., Tay, F.E.H., Ashok, S.M., Vicknesh, S., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84968
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84968

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