Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

10.1007/s00542-007-0429-7

Saved in:
Bibliographic Details
Main Authors: Ongkodjojo, A., Tay, F.E.H., Ashok, S.M., Vicknesh, S., Akkipeddi, R.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84968
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1007/s00542-007-0429-7

Similar Items