Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

10.1007/s00542-007-0429-7

Saved in:

Bibliographic Details
Main Authors:	Ongkodjojo, A., Tay, F.E.H., Ashok, S.M., Vicknesh, S., Akkipeddi, R.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84968
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-84968
record_format	dspace
spelling	sg-nus-scholar.10635-849682023-10-27T09:33:09Z Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications Ongkodjojo, A. Tay, F.E.H. Ashok, S.M. Vicknesh, S. Akkipeddi, R. MECHANICAL ENGINEERING 10.1007/s00542-007-0429-7 Microsystem Technologies 14 3 331-341 2014-10-07T09:02:26Z 2014-10-07T09:02:26Z 2008-03 Article Ongkodjojo, A., Tay, F.E.H., Ashok, S.M., Vicknesh, S., Akkipeddi, R. (2008-03). Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications. Microsystem Technologies 14 (3) : 331-341. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-007-0429-7 09467076 http://scholarbank.nus.edu.sg/handle/10635/84968 000252469800005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-007-0429-7
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Ongkodjojo, A. Tay, F.E.H. Ashok, S.M. Vicknesh, S. Akkipeddi, R.
format	Article
author	Ongkodjojo, A. Tay, F.E.H. Ashok, S.M. Vicknesh, S. Akkipeddi, R.
spellingShingle	Ongkodjojo, A. Tay, F.E.H. Ashok, S.M. Vicknesh, S. Akkipeddi, R. Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
author_sort	Ongkodjojo, A.
title	Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
title_short	Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
title_full	Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
title_fullStr	Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
title_full_unstemmed	Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications
title_sort	design, modeling, and mechanical characterizations of micromachined inp-based actuator for tunable moems applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84968
_version_	1781784549798182912

Design, modeling, and mechanical characterizations of micromachined InP-based actuator for tunable MOEMS applications

Similar Items