Defect-free wet etching through pyrex glass using Cr/Au mask

10.1007/s00542-006-0116-0

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Bibliographic Details
Main Authors:	Tay, F.E.H., Iliescu, C., Jing, J., Miao, J.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73307
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73307
record_format	dspace
spelling	sg-nus-scholar.10635-733072023-10-30T21:42:32Z Defect-free wet etching through pyrex glass using Cr/Au mask Tay, F.E.H. Iliescu, C. Jing, J. Miao, J. MECHANICAL ENGINEERING 10.1007/s00542-006-0116-0 Microsystem Technologies 12 10-11 935-939 2014-06-19T05:33:35Z 2014-06-19T05:33:35Z 2006-09 Conference Paper Tay, F.E.H., Iliescu, C., Jing, J., Miao, J. (2006-09). Defect-free wet etching through pyrex glass using Cr/Au mask. Microsystem Technologies 12 (10-11) : 935-939. ScholarBank@NUS Repository. https://doi.org/10.1007/s00542-006-0116-0 09467076 http://scholarbank.nus.edu.sg/handle/10635/73307 000239960600008 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00542-006-0116-0
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, F.E.H. Iliescu, C. Jing, J. Miao, J.
format	Conference or Workshop Item
author	Tay, F.E.H. Iliescu, C. Jing, J. Miao, J.
spellingShingle	Tay, F.E.H. Iliescu, C. Jing, J. Miao, J. Defect-free wet etching through pyrex glass using Cr/Au mask
author_sort	Tay, F.E.H.
title	Defect-free wet etching through pyrex glass using Cr/Au mask
title_short	Defect-free wet etching through pyrex glass using Cr/Au mask
title_full	Defect-free wet etching through pyrex glass using Cr/Au mask
title_fullStr	Defect-free wet etching through pyrex glass using Cr/Au mask
title_full_unstemmed	Defect-free wet etching through pyrex glass using Cr/Au mask
title_sort	defect-free wet etching through pyrex glass using cr/au mask
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73307
_version_	1781783297153564672

Defect-free wet etching through pyrex glass using Cr/Au mask

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