Development of an optical interferometer for micro-components inspection

Development of an optical interferometer for micro-components inspection

10.1117/12.621998

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Bibliographic Details
Main Authors: Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Fibre-end surface
Micro-components
Micro-mirror
Optical interferometry
Phase-shifting technique
PZT
Surface profile
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73345
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Institution: National University of Singapore
Description
Summary:10.1117/12.621998

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