Development of an optical interferometer for micro-components inspection

Development of an optical interferometer for micro-components inspection

10.1117/12.621998

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Bibliographic Details
Main Authors: Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Fibre-end surface
Micro-components
Micro-mirror
Optical interferometry
Phase-shifting technique
PZT
Surface profile
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73345
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Institution: National University of Singapore
id sg-nus-scholar.10635-73345
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spelling sg-nus-scholar.10635-733452024-11-13T04:23:42Z Development of an optical interferometer for micro-components inspection Wang, S.H. Quan, C. Tay, C.J. Reading, I. Fang, Z.P. MECHANICAL ENGINEERING Fibre-end surface Micro-components Micro-mirror Optical interferometry Phase-shifting technique PZT Surface profile 10.1117/12.621998 Proceedings of SPIE - The International Society for Optical Engineering 5852 PART I 345-351 PSISD 2014-06-19T05:34:00Z 2014-06-19T05:34:00Z 2005 Conference Paper Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P. (2005). Development of an optical interferometer for micro-components inspection. Proceedings of SPIE - The International Society for Optical Engineering 5852 PART I : 345-351. ScholarBank@NUS Repository. https://doi.org/10.1117/12.621998 0277786X http://scholarbank.nus.edu.sg/handle/10635/73345 000229932000057 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Fibre-end surface
Micro-components
Micro-mirror
Optical interferometry
Phase-shifting technique
PZT
Surface profile
spellingShingle Fibre-end surface
Micro-components
Micro-mirror
Optical interferometry
Phase-shifting technique
PZT
Surface profile
Wang, S.H.
Quan, C.
Tay, C.J.
Reading, I.
Fang, Z.P.
Development of an optical interferometer for micro-components inspection
description 10.1117/12.621998
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Wang, S.H.
Quan, C.
Tay, C.J.
Reading, I.
Fang, Z.P.
format Conference or Workshop Item
author Wang, S.H.
Quan, C.
Tay, C.J.
Reading, I.
Fang, Z.P.
author_sort Wang, S.H.
title Development of an optical interferometer for micro-components inspection
title_short Development of an optical interferometer for micro-components inspection
title_full Development of an optical interferometer for micro-components inspection
title_fullStr Development of an optical interferometer for micro-components inspection
title_full_unstemmed Development of an optical interferometer for micro-components inspection
title_sort development of an optical interferometer for micro-components inspection
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73345
_version_ 1821181678952906752

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