Edge effects characterization of phase shift mask

10.1116/1.1865112

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Bibliographic Details
Main Authors:	Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73384
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Institution:	National University of Singapore

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Summary:	10.1116/1.1865112

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