Edge effects characterization of phase shift mask

10.1116/1.1865112

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Bibliographic Details
Main Authors:	Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73384
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73384
record_format	dspace
spelling	sg-nus-scholar.10635-733842023-10-30T21:44:20Z Edge effects characterization of phase shift mask Chua, G.S. Tay, C.J. Quan, C. Lin, Q. MECHANICAL ENGINEERING 10.1116/1.1865112 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2 417-424 JVTBD 2014-06-19T05:34:28Z 2014-06-19T05:34:28Z 2005 Conference Paper Chua, G.S., Tay, C.J., Quan, C., Lin, Q. (2005). Edge effects characterization of phase shift mask. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 (2) : 417-424. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1865112 10711023 http://scholarbank.nus.edu.sg/handle/10635/73384 000228788600013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.1865112
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
format	Conference or Workshop Item
author	Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
spellingShingle	Chua, G.S. Tay, C.J. Quan, C. Lin, Q. Edge effects characterization of phase shift mask
author_sort	Chua, G.S.
title	Edge effects characterization of phase shift mask
title_short	Edge effects characterization of phase shift mask
title_full	Edge effects characterization of phase shift mask
title_fullStr	Edge effects characterization of phase shift mask
title_full_unstemmed	Edge effects characterization of phase shift mask
title_sort	edge effects characterization of phase shift mask
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73384
_version_	1781783304233549824

Edge effects characterization of phase shift mask

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