Nano-precision measurement of diamond tool edge radius for wafer fabrication

Nano-precision measurement of diamond tool edge radius for wafer fabrication

10.1016/S0924-0136(03)00757-X

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Bibliographic Details
Main Authors: Li, X.P., Rahman, M., Liu, K., Neo, K.S., Chan, C.C.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diamond tool
Edge radius
Measurement
Nano-precision
Wafer fabrication
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73672
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Institution: National University of Singapore
Description
Summary:10.1016/S0924-0136(03)00757-X

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