Nano-precision measurement of diamond tool edge radius for wafer fabrication

Nano-precision measurement of diamond tool edge radius for wafer fabrication

10.1016/S0924-0136(03)00757-X

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Bibliographic Details
Main Authors: Li, X.P., Rahman, M., Liu, K., Neo, K.S., Chan, C.C.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diamond tool
Edge radius
Measurement
Nano-precision
Wafer fabrication
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73672
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Institution: National University of Singapore
id sg-nus-scholar.10635-73672
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spelling sg-nus-scholar.10635-736722023-10-26T20:10:56Z Nano-precision measurement of diamond tool edge radius for wafer fabrication Li, X.P. Rahman, M. Liu, K. Neo, K.S. Chan, C.C. MECHANICAL ENGINEERING Diamond tool Edge radius Measurement Nano-precision Wafer fabrication 10.1016/S0924-0136(03)00757-X Journal of Materials Processing Technology 140 1-3 SPEC. 358-362 JMPTE 2014-06-19T05:37:58Z 2014-06-19T05:37:58Z 2003-09-22 Conference Paper Li, X.P., Rahman, M., Liu, K., Neo, K.S., Chan, C.C. (2003-09-22). Nano-precision measurement of diamond tool edge radius for wafer fabrication. Journal of Materials Processing Technology 140 (1-3 SPEC.) : 358-362. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-0136(03)00757-X 09240136 http://scholarbank.nus.edu.sg/handle/10635/73672 000185489700064 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diamond tool
Edge radius
Measurement
Nano-precision
Wafer fabrication
spellingShingle Diamond tool
Edge radius
Measurement
Nano-precision
Wafer fabrication
Li, X.P.
Rahman, M.
Liu, K.
Neo, K.S.
Chan, C.C.
Nano-precision measurement of diamond tool edge radius for wafer fabrication
description 10.1016/S0924-0136(03)00757-X
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Li, X.P.
Rahman, M.
Liu, K.
Neo, K.S.
Chan, C.C.
format Conference or Workshop Item
author Li, X.P.
Rahman, M.
Liu, K.
Neo, K.S.
Chan, C.C.
author_sort Li, X.P.
title Nano-precision measurement of diamond tool edge radius for wafer fabrication
title_short Nano-precision measurement of diamond tool edge radius for wafer fabrication
title_full Nano-precision measurement of diamond tool edge radius for wafer fabrication
title_fullStr Nano-precision measurement of diamond tool edge radius for wafer fabrication
title_full_unstemmed Nano-precision measurement of diamond tool edge radius for wafer fabrication
title_sort nano-precision measurement of diamond tool edge radius for wafer fabrication
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73672
_version_ 1781783324825485312

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