Optical interferometric inspection of surface contour of MEMS-components

Optical interferometric inspection of surface contour of MEMS-components

Key Engineering Materials

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Bibliographic Details
Main Authors: Tay, C.J., Wang, S.H., Quan, C.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Micro-accelerometer
Micro-components
Micromirror
Optical interferometry
Single fiber-end surface
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73717
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Institution: National University of Singapore
Description
Summary:Key Engineering Materials

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