Optical interferometric inspection of surface contour of MEMS-components

Key Engineering Materials

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Bibliographic Details
Main Authors:	Tay, C.J., Wang, S.H., Quan, C.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	MEMS Micro-accelerometer Micro-components Micromirror Optical interferometry Single fiber-end surface
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73717
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73717
record_format	dspace
spelling	sg-nus-scholar.10635-737172015-02-16T14:00:52Z Optical interferometric inspection of surface contour of MEMS-components Tay, C.J. Wang, S.H. Quan, C. MECHANICAL ENGINEERING MEMS Micro-accelerometer Micro-components Micromirror Optical interferometry Single fiber-end surface Key Engineering Materials 326-328 I 47-50 KEMAE 2014-06-19T05:38:32Z 2014-06-19T05:38:32Z 2006 Conference Paper Tay, C.J.,Wang, S.H.,Quan, C. (2006). Optical interferometric inspection of surface contour of MEMS-components. Key Engineering Materials 326-328 I : 47-50. ScholarBank@NUS Repository. 10139826 http://scholarbank.nus.edu.sg/handle/10635/73717 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	MEMS Micro-accelerometer Micro-components Micromirror Optical interferometry Single fiber-end surface
spellingShingle	MEMS Micro-accelerometer Micro-components Micromirror Optical interferometry Single fiber-end surface Tay, C.J. Wang, S.H. Quan, C. Optical interferometric inspection of surface contour of MEMS-components
description	Key Engineering Materials
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Wang, S.H. Quan, C.
format	Conference or Workshop Item
author	Tay, C.J. Wang, S.H. Quan, C.
author_sort	Tay, C.J.
title	Optical interferometric inspection of surface contour of MEMS-components
title_short	Optical interferometric inspection of surface contour of MEMS-components
title_full	Optical interferometric inspection of surface contour of MEMS-components
title_fullStr	Optical interferometric inspection of surface contour of MEMS-components
title_full_unstemmed	Optical interferometric inspection of surface contour of MEMS-components
title_sort	optical interferometric inspection of surface contour of mems-components
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73717
_version_	1681087798592929792

Optical interferometric inspection of surface contour of MEMS-components

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