Residual stress and profile evaluation on an optical MEMS device
Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
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2014
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sg-nus-scholar.10635-738142015-03-07T18:58:41Z Residual stress and profile evaluation on an optical MEMS device Tay, C.J. Quan, C. Akkipeddi, R. Gopal, M. MECHANICAL ENGINEERING Fabry-Perot filter Raman spectroscopy Residual stresses White light interferometry Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 2 786-791 2014-06-19T05:39:39Z 2014-06-19T05:39:39Z 2009 Conference Paper Tay, C.J.,Quan, C.,Akkipeddi, R.,Gopal, M. (2009). Residual stress and profile evaluation on an optical MEMS device. Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 2 : 786-791. ScholarBank@NUS Repository. 9781615671892 http://scholarbank.nus.edu.sg/handle/10635/73814 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| topic |
Fabry-Perot filter Raman spectroscopy Residual stresses White light interferometry |
| spellingShingle |
Fabry-Perot filter Raman spectroscopy Residual stresses White light interferometry Tay, C.J. Quan, C. Akkipeddi, R. Gopal, M. Residual stress and profile evaluation on an optical MEMS device |
| description |
Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Tay, C.J. Quan, C. Akkipeddi, R. Gopal, M. |
| format |
Conference or Workshop Item |
| author |
Tay, C.J. Quan, C. Akkipeddi, R. Gopal, M. |
| author_sort |
Tay, C.J. |
| title |
Residual stress and profile evaluation on an optical MEMS device |
| title_short |
Residual stress and profile evaluation on an optical MEMS device |
| title_full |
Residual stress and profile evaluation on an optical MEMS device |
| title_fullStr |
Residual stress and profile evaluation on an optical MEMS device |
| title_full_unstemmed |
Residual stress and profile evaluation on an optical MEMS device |
| title_sort |
residual stress and profile evaluation on an optical mems device |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73814 |
| _version_ |
1681087816170209280 |