Residual stress and profile evaluation on an optical MEMS device

Residual stress and profile evaluation on an optical MEMS device

Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009

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Bibliographic Details
Main Authors: Tay, C.J., Quan, C., Akkipeddi, R., Gopal, M.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Fabry-Perot filter
Raman spectroscopy
Residual stresses
White light interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73814
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/73814

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