Residual stress and profile evaluation on an optical MEMS device

• Main Authors: Tay, C.J., Quan, C., Akkipeddi, R., Gopal, M.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Fabry-Perot filter; Raman spectroscopy; Residual stresses; White light interferometry
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/73814

Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009