$Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology$

Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology

10.1117/12.536160

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Bibliographic Details
Main Authors:	Chua, G.S., Tay, C.J., Quan, C., Lin, Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffraction coefficients Geometrical theory of diffraction Optical proximity correction Phase shift masks Time-domain finite-difference algorithm
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73819
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73819
record_format	dspace
spelling	sg-nus-scholar.10635-738192023-10-26T20:11:12Z Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology Chua, G.S. Tay, C.J. Quan, C. Lin, Q. MECHANICAL ENGINEERING Diffraction coefficients Geometrical theory of diffraction Optical proximity correction Phase shift masks Time-domain finite-difference algorithm 10.1117/12.536160 Proceedings of SPIE - The International Society for Optical Engineering 5377 PART 2 1267-1278 PSISD 2014-06-19T05:39:43Z 2014-06-19T05:39:43Z 2004 Conference Paper Chua, G.S., Tay, C.J., Quan, C., Lin, Q. (2004). Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology. Proceedings of SPIE - The International Society for Optical Engineering 5377 (PART 2) : 1267-1278. ScholarBank@NUS Repository. https://doi.org/10.1117/12.536160 0277786X http://scholarbank.nus.edu.sg/handle/10635/73819 000222893200121 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction coefficients Geometrical theory of diffraction Optical proximity correction Phase shift masks Time-domain finite-difference algorithm
spellingShingle	Diffraction coefficients Geometrical theory of diffraction Optical proximity correction Phase shift masks Time-domain finite-difference algorithm Chua, G.S. Tay, C.J. Quan, C. Lin, Q. Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
description	10.1117/12.536160
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
format	Conference or Workshop Item
author	Chua, G.S. Tay, C.J. Quan, C. Lin, Q.
author_sort	Chua, G.S.
title	Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
title_short	Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
title_full	Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
title_fullStr	Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
title_full_unstemmed	Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
title_sort	rigorous diffraction analysis using geometrical theory of diffraction for future mask technology
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73819
_version_	1781783338303881216

Rigorous diffraction analysis using geometrical theory of diffraction for future mask technology

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