Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror
10.1117/12.420880
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2014
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sg-nus-scholar.10635-738842024-11-14T17:55:24Z Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror Chau, F.S. Zhang, X.M. Quan, C. Liu, A.Q. MECHANICAL ENGINEERING 10.1117/12.420880 Proceedings of SPIE - The International Society for Optical Engineering 4235 387-394 PSISD 2014-06-19T05:40:31Z 2014-06-19T05:40:31Z 2001 Conference Paper Chau, F.S., Zhang, X.M., Quan, C., Liu, A.Q. (2001). Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror. Proceedings of SPIE - The International Society for Optical Engineering 4235 : 387-394. ScholarBank@NUS Repository. https://doi.org/10.1117/12.420880 0277786X http://scholarbank.nus.edu.sg/handle/10635/73884 000169262900040 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1117/12.420880 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Chau, F.S. Zhang, X.M. Quan, C. Liu, A.Q. |
| format |
Conference or Workshop Item |
| author |
Chau, F.S. Zhang, X.M. Quan, C. Liu, A.Q. |
| spellingShingle |
Chau, F.S. Zhang, X.M. Quan, C. Liu, A.Q. Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| author_sort |
Chau, F.S. |
| title |
Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| title_short |
Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| title_full |
Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| title_fullStr |
Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| title_full_unstemmed |
Study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| title_sort |
study of snap-down phenomenon in an electrostatically-actuated torsional micromirror |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73884 |
| _version_ |
1821228329001287680 |