Modeling and scheduling stepper operations in the photolithography process in wafer fabrication

Modeling and scheduling stepper operations in the photolithography process in wafer fabrication

AIChE Annual Meeting, Conference Proceedings

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Bibliographic Details
Main Authors: Ganesh, B., Karimi, I.A.
Other Authors: CHEMICAL & BIOMOLECULAR ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Batch
Photolithography
Scheduling
Steppers
Wafer fabrication
Online Access:http://scholarbank.nus.edu.sg/handle/10635/74661
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/74661

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