Modeling and scheduling stepper operations in the photolithography process in wafer fabrication

AIChE Annual Meeting, Conference Proceedings

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Bibliographic Details
Main Authors:	Ganesh, B., Karimi, I.A.
Other Authors:	CHEMICAL & BIOMOLECULAR ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Batch Photolithography Scheduling Steppers Wafer fabrication
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/74662
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-74662
record_format	dspace
spelling	sg-nus-scholar.10635-746622015-02-28T06:03:13Z Modeling and scheduling stepper operations in the photolithography process in wafer fabrication Ganesh, B. Karimi, I.A. CHEMICAL & BIOMOLECULAR ENGINEERING Batch Photolithography Scheduling Steppers Wafer fabrication AIChE Annual Meeting, Conference Proceedings 7825-7826 2014-06-19T06:14:58Z 2014-06-19T06:14:58Z 2004 Conference Paper Ganesh, B.,Karimi, I.A. (2004). Modeling and scheduling stepper operations in the photolithography process in wafer fabrication. AIChE Annual Meeting, Conference Proceedings : 7825-7826. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/74662 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Batch Photolithography Scheduling Steppers Wafer fabrication
spellingShingle	Batch Photolithography Scheduling Steppers Wafer fabrication Ganesh, B. Karimi, I.A. Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
description	AIChE Annual Meeting, Conference Proceedings
author2	CHEMICAL & BIOMOLECULAR ENGINEERING
author_facet	CHEMICAL & BIOMOLECULAR ENGINEERING Ganesh, B. Karimi, I.A.
format	Conference or Workshop Item
author	Ganesh, B. Karimi, I.A.
author_sort	Ganesh, B.
title	Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
title_short	Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
title_full	Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
title_fullStr	Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
title_full_unstemmed	Modeling and scheduling stepper operations in the photolithography process in wafer fabrication
title_sort	modeling and scheduling stepper operations in the photolithography process in wafer fabrication
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/74662
_version_	1681087966627233792

Modeling and scheduling stepper operations in the photolithography process in wafer fabrication

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