Electrostatic spring effect on the dynamic performance of microresonators

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

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書目詳細資料
Main Authors:	Francis Tay, E.H., Kumaran, R., Chua, B.L., Logeeswaran, V.J.
其他作者:	MECHANICAL & PRODUCTION ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
主題:	Electrostatic spring effect Natural frequency Resonator Simulation Uncertainty analysis
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/74991
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

實物特徵
總結:	2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

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