Electrostatic spring effect on the dynamic performance of microresonators
2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
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Main Authors: | Francis Tay, E.H., Kumaran, R., Chua, B.L., Logeeswaran, V.J. |
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其他作者: | MECHANICAL & PRODUCTION ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/74991 |
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機構: | National University of Singapore |
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