Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R.
Other Authors: CHEMICAL ENGINEERING
Published: 2014
Subjects:
Computer simulation
Masking linearity
Notching
Off-axis mumination
Optical proximity effect
Organic barc
Photoresist
Polycide
Reflectivity
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75291
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Institution: National University of Singapore
Description
Summary:Proceedings of SPIE - The International Society for Optical Engineering

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