Footing reduction in the organic bottom anti-reflective coating implementation

Footing reduction in the organic bottom anti-reflective coating implementation

10.1117/12.280540

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Bibliographic Details
Main Authors: Ko, T.-M., Cheng, A.
Other Authors: CHEMICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Computer simulation
Descrum
Footing
Organic barc
Photoresist
Planarization
Reflectivity
Resist profile
Sidewall angle
Swing curve
Online Access:http://scholarbank.nus.edu.sg/handle/10635/91810
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/91810

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