Footing reduction in the organic bottom anti-reflective coating implementation

10.1117/12.280540

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Bibliographic Details
Main Authors:	Ko, T.-M., Cheng, A.
Other Authors:	CHEMICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/91810
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-91810
record_format	dspace
spelling	sg-nus-scholar.10635-918102023-10-25T07:39:11Z Footing reduction in the organic bottom anti-reflective coating implementation Ko, T.-M. Cheng, A. CHEMICAL ENGINEERING Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve 10.1117/12.280540 Proceedings of SPIE - The International Society for Optical Engineering 3183 196-206 PSISD 2014-10-09T08:22:33Z 2014-10-09T08:22:33Z 1997 Conference Paper Ko, T.-M., Cheng, A. (1997). Footing reduction in the organic bottom anti-reflective coating implementation. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 196-206. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280540 0277786X http://scholarbank.nus.edu.sg/handle/10635/91810 A1997BJ57L00021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve
spellingShingle	Computer simulation Descrum Footing Organic barc Photoresist Planarization Reflectivity Resist profile Sidewall angle Swing curve Ko, T.-M. Cheng, A. Footing reduction in the organic bottom anti-reflective coating implementation
description	10.1117/12.280540
author2	CHEMICAL ENGINEERING
author_facet	CHEMICAL ENGINEERING Ko, T.-M. Cheng, A.
format	Conference or Workshop Item
author	Ko, T.-M. Cheng, A.
author_sort	Ko, T.-M.
title	Footing reduction in the organic bottom anti-reflective coating implementation
title_short	Footing reduction in the organic bottom anti-reflective coating implementation
title_full	Footing reduction in the organic bottom anti-reflective coating implementation
title_fullStr	Footing reduction in the organic bottom anti-reflective coating implementation
title_full_unstemmed	Footing reduction in the organic bottom anti-reflective coating implementation
title_sort	footing reduction in the organic bottom anti-reflective coating implementation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/91810
_version_	1781785695717687296

Footing reduction in the organic bottom anti-reflective coating implementation

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