Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R.
Other Authors: CHEMICAL ENGINEERING
Published: 2014
Subjects:
Computer simulation
Masking linearity
Notching
Off-axis mumination
Optical proximity effect
Organic barc
Photoresist
Polycide
Reflectivity
Online Access:http://scholarbank.nus.edu.sg/handle/10635/75291
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Institution: National University of Singapore
id sg-nus-scholar.10635-75291
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spelling sg-nus-scholar.10635-752912021-10-05T22:32:46Z Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication Ko, T.-M. Fan, M.-H. Cheng, A. Yu, R. CHEMICAL ENGINEERING Computer simulation Masking linearity Notching Off-axis mumination Optical proximity effect Organic barc Photoresist Polycide Reflectivity Proceedings of SPIE - The International Society for Optical Engineering 3183 207-217 PSISD 2014-06-19T09:49:30Z 2014-06-19T09:49:30Z 1997 Ko, T.-M., Fan, M.-H., Cheng, A., Yu, R. (1997). Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 207-217. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/75291 A1997BJ57L00022 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Computer simulation
Masking linearity
Notching
Off-axis mumination
Optical proximity effect
Organic barc
Photoresist
Polycide
Reflectivity
spellingShingle Computer simulation
Masking linearity
Notching
Off-axis mumination
Optical proximity effect
Organic barc
Photoresist
Polycide
Reflectivity
Ko, T.-M.
Fan, M.-H.
Cheng, A.
Yu, R.
Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
description Proceedings of SPIE - The International Society for Optical Engineering
author2 CHEMICAL ENGINEERING
author_facet CHEMICAL ENGINEERING
Ko, T.-M.
Fan, M.-H.
Cheng, A.
Yu, R.
author Ko, T.-M.
Fan, M.-H.
Cheng, A.
Yu, R.
author_sort Ko, T.-M.
title Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_short Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_full Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_fullStr Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_full_unstemmed Implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
title_sort implementation of organic bottom anti-reflective coating in 0.35 μm polycide fabrication
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/75291
_version_ 1713206597134581760

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