Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques

10.1016/j.nimb.2007.02.062

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Bibliographic Details
Main Authors:	Wang, L.P., Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Pan, X.T., Wohland, T., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Lab-on-a-chip Nanofabrication Nanofluidics Proton beam writing Thermal bonding
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/76161
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-76161
record_format	dspace
spelling	sg-nus-scholar.10635-761612023-10-26T21:04:54Z Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques Wang, L.P. Shao, P.G. van Kan, J.A. Ansari, K. Bettiol, A.A. Pan, X.T. Wohland, T. Watt, F. PHYSICS CHEMISTRY Lab-on-a-chip Nanofabrication Nanofluidics Proton beam writing Thermal bonding 10.1016/j.nimb.2007.02.062 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 1 450-454 NIMBE 2014-06-23T05:39:20Z 2014-06-23T05:39:20Z 2007-07 Article Wang, L.P., Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Pan, X.T., Wohland, T., Watt, F. (2007-07). Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 260 (1) : 450-454. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2007.02.062 0168583X http://scholarbank.nus.edu.sg/handle/10635/76161 000248264900087 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Lab-on-a-chip Nanofabrication Nanofluidics Proton beam writing Thermal bonding
spellingShingle	Lab-on-a-chip Nanofabrication Nanofluidics Proton beam writing Thermal bonding Wang, L.P. Shao, P.G. van Kan, J.A. Ansari, K. Bettiol, A.A. Pan, X.T. Wohland, T. Watt, F. Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
description	10.1016/j.nimb.2007.02.062
author2	PHYSICS
author_facet	PHYSICS Wang, L.P. Shao, P.G. van Kan, J.A. Ansari, K. Bettiol, A.A. Pan, X.T. Wohland, T. Watt, F.
format	Article
author	Wang, L.P. Shao, P.G. van Kan, J.A. Ansari, K. Bettiol, A.A. Pan, X.T. Wohland, T. Watt, F.
author_sort	Wang, L.P.
title	Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
title_short	Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
title_full	Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
title_fullStr	Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
title_full_unstemmed	Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
title_sort	fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/76161
_version_	1781783563000086528

Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques

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