Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques

• Main Authors: Wang, L.P., Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Pan, X.T., Wohland, T., Watt, F.
• Other Authors: PHYSICS
• Format: Article
• Published: 2014
• Subjects: Lab-on-a-chip; Nanofabrication; Nanofluidics; Proton beam writing; Thermal bonding
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/76161
• Institution: National University of Singapore

10.1016/j.nimb.2007.02.062