Fabrication of nanofluidic devices utilizing proton beam writing and thermal bonding techniques
10.1016/j.nimb.2007.02.062
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Main Authors: | Wang, L.P., Shao, P.G., van Kan, J.A., Ansari, K., Bettiol, A.A., Pan, X.T., Wohland, T., Watt, F. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/76161 |
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Institution: | National University of Singapore |
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