On Multi-Zone Tracking and Non-Gaussian Noise Filtering for Model Predictive Control

On Multi-Zone Tracking and Non-Gaussian Noise Filtering for Model Predictive Control

Ph.D

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Bibliographic Details
Main Author: WANG XIAOQIONG
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2014
Subjects:
Optimal Control, Semiconductor Manufacturing, Temperature Control, Model Predictive Control, Non-Gaussian Noise Filter, Computational Load
Online Access:http://scholarbank.nus.edu.sg/handle/10635/78949
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/78949

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