Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching

Ph.D

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Bibliographic Details
Main Author: XIONG BOQIAN
Other Authors: PHYSICS
Format: Theses and Dissertations
Language:English
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80187
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Institution: National University of Singapore
Language: English