Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching

Ph.D

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Bibliographic Details
Main Author:	XIONG BOQIAN
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2014
Subjects:	silicon photonics, silicon waveguide, ion beam irradiation, electrochemical etching, porous silicon, Bragg waveguide
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80187
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-80187
record_format	dspace
spelling	sg-nus-scholar.10635-801872015-01-12T18:01:40Z Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching XIONG BOQIAN PHYSICS MARK B H BREESE TEO EE JIN silicon photonics, silicon waveguide, ion beam irradiation, electrochemical etching, porous silicon, Bragg waveguide Ph.D DOCTOR OF PHILOSOPHY 2014-09-30T18:00:37Z 2014-09-30T18:00:37Z 2014-01-23 Thesis XIONG BOQIAN (2014-01-23). Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/80187 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	silicon photonics, silicon waveguide, ion beam irradiation, electrochemical etching, porous silicon, Bragg waveguide
spellingShingle	silicon photonics, silicon waveguide, ion beam irradiation, electrochemical etching, porous silicon, Bragg waveguide XIONG BOQIAN Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS XIONG BOQIAN
format	Theses and Dissertations
author	XIONG BOQIAN
author_sort	XIONG BOQIAN
title	Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
title_short	Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
title_full	Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
title_fullStr	Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
title_full_unstemmed	Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
title_sort	fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80187
_version_	1681088847501328384

Fabrication of low loss silicon waveguides by ion irradiation and electrochemical etching

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