A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface

Japanese Journal of Applied Physics, Part 2: Letters

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Bibliographic Details
Main Authors:	Lu, Y.-F., Song, W.-D., Ye, K.-D., Lee, Y.-P., Chan, D.S.H., Low, T.-S.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Adhesion force Cleaning force Cleaning model Cleaning threshold Laser cleaning Particle removal Quartz particle Silicon substrate
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80270
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80270
record_format	dspace
spelling	sg-nus-scholar.10635-802702015-01-07T14:12:09Z A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface Lu, Y.-F. Song, W.-D. Ye, K.-D. Lee, Y.-P. Chan, D.S.H. Low, T.-S. ELECTRICAL ENGINEERING DATA STORAGE INSTITUTE Adhesion force Cleaning force Cleaning model Cleaning threshold Laser cleaning Particle removal Quartz particle Silicon substrate Japanese Journal of Applied Physics, Part 2: Letters 36 10 PART A L1304-L1306 JAPLD 2014-10-07T02:55:40Z 2014-10-07T02:55:40Z 1997-10-01 Article Lu, Y.-F.,Song, W.-D.,Ye, K.-D.,Lee, Y.-P.,Chan, D.S.H.,Low, T.-S. (1997-10-01). A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface. Japanese Journal of Applied Physics, Part 2: Letters 36 (10 PART A) : L1304-L1306. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/80270 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Adhesion force Cleaning force Cleaning model Cleaning threshold Laser cleaning Particle removal Quartz particle Silicon substrate
spellingShingle	Adhesion force Cleaning force Cleaning model Cleaning threshold Laser cleaning Particle removal Quartz particle Silicon substrate Lu, Y.-F. Song, W.-D. Ye, K.-D. Lee, Y.-P. Chan, D.S.H. Low, T.-S. A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
description	Japanese Journal of Applied Physics, Part 2: Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.-F. Song, W.-D. Ye, K.-D. Lee, Y.-P. Chan, D.S.H. Low, T.-S.
format	Article
author	Lu, Y.-F. Song, W.-D. Ye, K.-D. Lee, Y.-P. Chan, D.S.H. Low, T.-S.
author_sort	Lu, Y.-F.
title	A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
title_short	A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
title_full	A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
title_fullStr	A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
title_full_unstemmed	A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
title_sort	cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80270
_version_	1681088855885742080

A cleaning model for removal of particles due to laser-induced thermal expansion of substrate surface

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