Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency

Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency

Diffusion and Defect Data Pt.B: Solid State Phenomena

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Bibliographic Details
Main Authors: Phang, J.C.H., Chan, D.S.H., Chim, W.K., Liu, Y.Y., Liu, X.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80314
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Institution: National University of Singapore
Description
Summary:Diffusion and Defect Data Pt.B: Solid State Phenomena

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