Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency

Diffusion and Defect Data Pt.B: Solid State Phenomena

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Main Authors:	Phang, J.C.H., Chan, D.S.H., Chim, W.K., Liu, Y.Y., Liu, X.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80314
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80314
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spelling	sg-nus-scholar.10635-803142015-02-26T17:12:04Z Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency Phang, J.C.H. Chan, D.S.H. Chim, W.K. Liu, Y.Y. Liu, X. ELECTRICAL ENGINEERING Diffusion and Defect Data Pt.B: Solid State Phenomena 63-64 159-170 DDBPE 2014-10-07T02:56:10Z 2014-10-07T02:56:10Z 1998 Article Phang, J.C.H.,Chan, D.S.H.,Chim, W.K.,Liu, Y.Y.,Liu, X. (1998). Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency. Diffusion and Defect Data Pt.B: Solid State Phenomena 63-64 : 159-170. ScholarBank@NUS Repository. 10120394 http://scholarbank.nus.edu.sg/handle/10635/80314 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Diffusion and Defect Data Pt.B: Solid State Phenomena
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Phang, J.C.H. Chan, D.S.H. Chim, W.K. Liu, Y.Y. Liu, X.
format	Article
author	Phang, J.C.H. Chan, D.S.H. Chim, W.K. Liu, Y.Y. Liu, X.
spellingShingle	Phang, J.C.H. Chan, D.S.H. Chim, W.K. Liu, Y.Y. Liu, X. Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
author_sort	Phang, J.C.H.
title	Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
title_short	Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
title_full	Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
title_fullStr	Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
title_full_unstemmed	Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
title_sort	cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80314
_version_	1681088864533348352

Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency

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