Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
Diffusion and Defect Data Pt.B: Solid State Phenomena
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Main Authors: | Phang, J.C.H., Chan, D.S.H., Chim, W.K., Liu, Y.Y., Liu, X. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80314 |
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Institution: | National University of Singapore |
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