Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing
Journal of Applied Physics
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sg-nus-scholar.10635-803472024-11-11T00:39:10Z Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. ELECTRICAL ENGINEERING PHYSICS Journal of Applied Physics 83 4 2308-2314 JAPIA 2014-10-07T02:56:32Z 2014-10-07T02:56:32Z 1998-02-15 Article Choi, W.K.,Choo, C.K.,Han, K.K.,Chen, J.H.,Loh, F.C.,Tan, K.L. (1998-02-15). Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing. Journal of Applied Physics 83 (4) : 2308-2314. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80347 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| author_sort |
Choi, W.K. |
| title |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_short |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_full |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_fullStr |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_full_unstemmed |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_sort |
densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80347 |
| _version_ |
1821192247096377344 |