Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing
Journal of Applied Physics
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sg-nus-scholar.10635-803472015-01-15T20:06:13Z Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. PHYSICS ELECTRICAL ENGINEERING Journal of Applied Physics 83 4 2308-2314 JAPIA 2014-10-07T02:56:32Z 2014-10-07T02:56:32Z 1998-02-15 Article Choi, W.K.,Choo, C.K.,Han, K.K.,Chen, J.H.,Loh, F.C.,Tan, K.L. (1998-02-15). Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing. Journal of Applied Physics 83 (4) : 2308-2314. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/80347 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore |
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| description |
Journal of Applied Physics |
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PHYSICS |
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PHYSICS Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Choo, C.K. Han, K.K. Chen, J.H. Loh, F.C. Tan, K.L. Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| author_sort |
Choi, W.K. |
| title |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_short |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_full |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_fullStr |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_full_unstemmed |
Densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| title_sort |
densification of radio frequency sputtered silicon oxide films by rapid thermal annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/80347 |
| _version_ |
1681088870727286784 |