Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester

Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester

Microelectronic Engineering

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Main Authors: Sim, K.S., Phang, J.C.H., Chan, D.S.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80367
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-803672015-01-08T19:20:32Z Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester Sim, K.S. Phang, J.C.H. Chan, D.S.H. ELECTRICAL ENGINEERING INSTITUTE OF MICROELECTRONICS Microelectronic Engineering 26 3-4 155-166 MIENE 2014-10-07T02:56:45Z 2014-10-07T02:56:45Z 1995-11 Article Sim, K.S.,Phang, J.C.H.,Chan, D.S.H. (1995-11). Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester. Microelectronic Engineering 26 (3-4) : 155-166. ScholarBank@NUS Repository. 01679317 http://scholarbank.nus.edu.sg/handle/10635/80367 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Microelectronic Engineering
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Sim, K.S.
Phang, J.C.H.
Chan, D.S.H.
format Article
author Sim, K.S.
Phang, J.C.H.
Chan, D.S.H.
spellingShingle Sim, K.S.
Phang, J.C.H.
Chan, D.S.H.
Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
author_sort Sim, K.S.
title Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
title_short Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
title_full Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
title_fullStr Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
title_full_unstemmed Effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
title_sort effect of micro-extraction field and physical dimensions on the charging dynamics of integrated circuit passivation layer probe-holes in the electron beam tester
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/80367
_version_ 1681088874424565760

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